A Piezoelectric Actuator with Coded Control for Nanotechnology

--><!-- S. M. Afonin, PhD National Research University of Electronic Technology (Moscow Institute of Electronic Technology MIET), Moscow, Russia Part of the book: Advances in Nanotechnology. Volume 29Chapter DOI: https://doi.org/10.52305/JQHI2740 Abstract In this chapter, a piezoelectric actuator with coded control is investigated for use in nanoresearch. A piezoelectric actuator with coded control is employed in nanotechnology, adaptive optics, astronomy, and nanobiomedicine. The mechanical and adjustment characteristics of a piezoelectric actuator with coded control are obtained. The transfer functions of a piezoelectric actuator are investigated. The transient characteristics of a piezoelectric actuator are used in nanotechnology. The mechanical and adjustment characteristics of a piezoelectric actuator with coded control are considered using the equations of piezoelectric effect and mechanical load. The transfer functions of a piezoelectric actuator with coded control are determined at elastic inertial load. The transient characteristics of a piezoelectric actuator are transferred using the rigidity and the mass of a load. The deformations of a piezoelectric actuator with coded control are obtained for longitudinal, transverse, ands hift piezoelectric effects. Keywords: piezoelectric actuator, coded control, deformation, mechanical and adjustment characteristics, transfer function, transient characteristic, nanotechnology. References [1] Schultz J, Ueda J, Asada H. Cellular Actuators. Butterworth-Heinemann Publisher:Oxford, 2017, 382 p. [2] Mason W. Physical Acoustics: Principles and Methods. Vol. 1. Part A. Methods and Devices; Mason W., Ed., Academic Press: New York, 1964, 515 p. [3] Bhushan B. Springer Handbook of Nanotechnology. Springer: Berlin, New York,2004, 1222 p. [4] Uchino K. Piezoelectric Actuator and Ultrasonic Motors. 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